中国科学技术大学自旋电子材料与器件实验室--自旋电子材料与器件实验室-- P. Li, V. Sankara, F. Shah, H. Dey, G. Csaba, et al. Fabrication of Pseudo-Spin-Valve Giant Magnetoresistance Arrays for Nanomagnet Logic by Liftoff and the Snow-Jet Process.

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P. Li, V. Sankara, F. Shah, H. Dey, G. Csaba, et al. Fabrication of Pseudo-Spin-Valve Giant Magnetoresistance Arrays for Nanomagnet Logic by Liftoff and the Snow-Jet Process.

发布时间：2024-04-23点击次数：

DOI码：
10.1116/1.4907408
发表刊物：
Journal of Vacuum Science & Technology B
摘要：
In Nanomagnet Logic, an electronic read-out device converts magnetization to electronic signals. A giant magnetoresistance (GMR) stack, with simple deposition procedures, is a good candidate for this purpose. In this paper, the authors propose a way to pattern GMR films with the help of a CO2 snow-jet to simplify device fabrication procedures. A scanning electron microscope and a vibrating sample magnetometer were used to characterize the devices and verify the feasibility of the fabrication method. Results have shown that the CO2 snow-jet process can remove sidewalls of nanopillars that are formed after lift-off of sputtered films, and the nanopillars are uniform in shape and size. This method presents a new way to fabricate electronic readout devices for Nanomagnet Logic circuits.
论文类型：
期刊论文
卷号：
33
期号：
2
是否译文：
否
发表时间：
2015-02-20

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